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Industrial Light Sources &

Applications Technology

All about Industrial Lamps


& Optical Systems
Company Introduction

CEO Message

On the basis of continuous R&D and accumulated technology and experience from Samsung, Unilam
produces and sales specialized light sources used in high-technology business areas such as electronics,
automobiles, etc. These light sources are also used in the optical systems Unilam designs and manufactures.
Especially, Unilam’s UV exposure systems, Curing systems, and AOI light source units are the examples of its
superiority in UV market.

In the Specialty lamp market, Unilam’s Fishing lamp, Aquarium lamp, Tanning lamp, and Grow lamp have
become exclusively dominant in the domestic market and also have been recognized as high quality
products overseas.

Unilam values quality and technology oriented customer service. We will constantly strive to achieve
distinctive technological superiority and high productivity efficiency to grow as the world best company.

Thank you.

02
Company History

2000 ~ 2003 The establishment of UNILAM Co., Ltd. Independence from the Lighting Business in Samsung group
Foundation of R&D center and Completion of new Unilam manufacture building
Achieved ISO 9001:2000

2004 ~ 2005 Development of UV Spot Curing System


Development of UV Irradiation System for Automatic Inspection for LCD Liquid crystal
Development of OLED UV Curing System (Highly Advanced National Project)

2006~ 2008 CE Achieved on Metal Halide Series Lamps


Attained FDA approval on Aquarium Lamp
Development & Sales of great wide area LCD curing System

2009~ 2012 Achieved ISO 2001:2009 / ISO 9001:2008


Achieved ISO 14001
Achieved Korea-EU FTA for Tanning Lamp

Vision
Specialization
Management Principle Logo
·Value quality and Unity
technology for customers New Challenge
High quality Integrity
·Elevate the quality of
member’s living standard Liability
Achievement
·Embody company's social
Morals
Creation of contribution
new market

Certification

KS Q ISO 9001 : 2009 KS I ISO 14001 : 2009 CE Certificate


ISO 9001 : 2008 ISO 14001 : 2004 Attestation of Conformity

03
Company Introduction

Business Area

Industrial Lamp Series


Super High Pressure Short Arc Lamp
High/Medium Pressure UV Long Arc Lamp UV Curing & Drying System
Super High Pressure Capillary Mercury Lamp UV Exposure System
Xenon Flash Lamp UV System for Inspection
Excimer Lamp Business Area
Super Pure Water Treatment
Low Pressure Mercury Lamp & Surface Improvement System
(High Power Type) Power Supply
Low Pressure Mercury Fluorescent Lamp Other Optical Components

Optical Systems

Contents
01. Quick Reference Applications 06
Features 07

02. Industrial Lamp Series Super High Pressure Short Arc Lamp 08
High/Medium Pressure UV Mercury Lamp 10
High/Medium Pressure UV Metal(Fe) Lamp 12
High/Medium Pressure UV Metal(Ga) Lamp 12
Xenon Flash Lamp 14
Super High Pressure Capillary Mercury Lamp 14
Excimer Lamp 15
Low Pressure Mercury Lamp 16
Low Pressure Mercury UV Fluorescent Lamp 17

03. Optical Systems UV Curing & Drying System 18


UV Exposure System 21
UV System for Inspection 23
UV Module System 24
Super Pure Water Treatment & Surface Improvement System 25
Power Supply 26
Other Optical Components 27

04
All about Industrial Lamps
& Optical Systems

05
Quick Reference

Applications Quick Selection Guide by Applications

Light Source Short Arc Lamp Long Arc Lamp Low


Xenon
Xenon Pressure
Field Mercury Metal Xenon Mercury Metal(Fe) Metal(Ga) Flash Capillary Mercury
Mercury Lamp
Applications Lamp Lamp Lamp Lamp Lamp Lamp Lamp
Lamp
Wafer Inspection Systems
Semiconductor

Flim Thickness
Measurement
Purification
UV Exposure System
On the Wafer
Wavelength Calibration
Analysis

UV/ Visible
Spectrophotometer
Solar Simulator
Information

Standard Light Source


Search Light
Projector
Spectrophotometer
Digital Printer
Label
Printing

CD/DVD
Marking
Silk Screen
UV Ink & Varnish
Car Headlight Coating
Wood Coating
Curing/ Exposure

Cell Phone Coating


Plate Marking
Etching Exposure
Optical Film Coating
LCD Exposure
FPD Curing
PCB
Film-Glass
Cosmetic
Medical/

Hair & Tatoo Removal


Skin Rejuvenation
Welding
Welding

Cutting
Drilling
Water Treatment

06
Features Quick Selection Guide by Features
Lamp Features of Lamp Spectral Distribution Wattage
▪ Specific Wavelength (G-Line, I-Line, etc.)

INTENSITY
INTENSITY
Mercury ▪ Luminous body is small and point light
▪ High Luminance 100~5,000W
Lamp ▪ Long Life : 1,500~2,000hrs
▪ High Stability wavelength

▪ Specific Wavelength (G-Line, I-Line, etc.)

INTENSITY
Metal ▪ Strong Far Ultraviolet Radiation
▪ High Luminance 250~350W
Lamp ▪ Long Life : 1,500hrs
▪ High Stability
Short Arc Lamp

wavelength

▪ Continuous Spectral Distribution(From UV to visible ray region)

INTENSITY
Xenon ▪ Small but high-luminant illuminator(Being similar to a point light source)
Mercury ▪ Long Life : 3,000hrs 200~250W
Lamp ▪ High UV intensity
▪ Instant relighting available wavelength

▪ Spectral distribution similar to sunlight


▪ Instant relighting available
INTENSITY

Xenon ▪ Small and high-luminant illuminator


75~500W
Lamp ▪ Long Life : 1,500~3,000hrs
▪ Arc Point Non-Shift
▪ High Stability Fluctuation
wavelength

▪ A wide-Area Scattered light source


INTENSITY
INTENSITY

Mercury ▪ Stable emission intensity


400~20,000W
Lamp ▪ Uniform Distribution of Luminance
▪ Intensity of Uniformity wavelength
Long Arc Lamp

INTENSITY

▪ Continuous spectrum and Metal’s Unique spectrum


Metal(Fe)
▪ UV radiation amount is bigger(than other products) 3,000~14,000W
Lamp
▪ Applied to thick coating or color coating
wavelength

▪ Metal’s unique spectrum


INTENSITY

Metal(Ga) ▪ 420nm of center wavelength


800~12,500W
Lamp ▪ A wide-area Collimated light source
▪ Stable emission intensity wavelength

▪ Lamp to lamp consistency


Flash Lamp

INTENSITY

▪ Reliability
Xenon

▪ Stable output 1800W


▪ Long lifetime
▪ Increased production capacity wavelength
INTENSITY

▪ High efficiency
Pressure
Mercury

▪ Provide short wavelength ultraviolet energy


Lamp
Low

80~140W
▪ Atoms of organic substances floating in the air for the thin film
of organic solvents can be removed in a short period of time.
wavelength
INTENSITY

▪ Intense source of radiant energy from the ultraviolet through


Capillary

the near infrared range


Lamp

900~5,000W
▪ No warming-up period for staring or resting
▪ Reach almost full brightness with a few seconds wavelength

07
Industrial Lamp Series

Super High Pressure Short Arc Lamp

08
Description
SHMA Mercury Lamp series is a durable high-luminance light source with stable emission strength.
SHMA Xenon Mercury Lamp series (Deep UV Lamp) is a point light source with high-luminance.
SHMA Xenon Lamp series has the continuous spectrum similar to the visible and infrared region of daylight.
SHMA Metal Lamp series provides a high–luminance point light source even with low power.

▪ Exposure for wafer, LCD, PCB, UV adhesion, Inspection (scratches on a glass or wafer), etc.
Application
▪ Projector, Solar Module, Searchlight, Fiber Lighting Device etc.
▪ Used as the light source for inspection and analysis device.
Lamp Type Arc Length[mm] Total Length[mm] Target Item
SHMA 250/LT 2.5 150 max. USH-250LT(Ushio)
SHMA 250/MI 2.5 150 max. USH-250DL(Ushio)
SHMA 250/AF-T 2.5 150 max. USH-250AF-T(Ushio)
SHMA 250/BY 2.5 138 max. USH-250BY(Ushio)
SHMA 255/BY 2.0 138 max. USH-255BY(Ushio)
SHMA 256/BY 2.0 146 max. USH-256BY(Ushio)
SHMA 250/R 2.0 133 max. SH253D-TE(Toshiba)
SHMA 250/AN 2.0 150 max. ANUPS252(Nais)
SHMA 250/HS 2.0 150 max. 250SB1142
SHMA 350 3.0 123 max. HBO 350W/S(Osram)
SHMA 350/SA 3.0 150 max. L3501L(Sanei)
YSH1002MA(Yumex)
SHMA 1000 3.0 200 max. AHD-750-N(ORC)
SH1002MA-TE(Toshiba)
AHD-750-N(ORC)
SHMA 1000/O 3.0 200 max.
YSH-1002NA(Yumex)
SHMA 1000/U 3.0 200 max. USH-1002FN6(Ushio)
SHMA 2000/PA 4.0 320 max. VTD-2000P(ORC)
SHMA 250/MH-DC 2.0 90. max MHB 250(Moritex)
SHMA 210/P 2.0 90. max SHP 97 (Pheonix)
SHMA 200/DY 2.0 90. max Blue Wave 200
SHMA 250/MH-DC/IW 2.0 90. max MHB 250(DIT)
SHMA 250/MH-DC/N 2.0 90. max 500NTK
SHMA 350/MH-DC 2.0 90. max MHB350
SHMA 400/MH-DC 2.0 98. max MHB400 (Osram)
SHMA 200/XM-N 2.0 150 max. ANUPS204(Nais)
SHMA 200/XM-E 2.0 150 max. L-2002(EYE)
SHMA 200/XM-HA 2.0 150 max. L8251(Hamamatsu)
SHMA 250/XM 2.0 146 max. UXM-Q256BY(Ushio)
SHMA 75/Xe 1.3 90 max. L2174-1
SHMA 150/Xe-HA 2 150 max. L8253(Hamamatsu)
SHMA 500/XE-Y 4.0 148 max. YLT-500X

SHMA 250/LT SHMA 250/BY SHMA 250/MH-DC SHMA 2000PA SHMA 250/AN SHMA 250/MI

09
Industrial Lamp Series

High/Medium Pressure UV Mercury Lamp

10
Description
High/Middle Pressure UV Mercury Lamp uses the mercury's unique spectrum, and the center wavelength of lamp
light emission is 365nm and 435nm region (including 405nm). This product provides a wide-area scattered light
source which has a stable emission intensity. In particular, this product, using 320-440nm light, is applied to the
coating, curing, and drying in LCD manufacturing process, and it is preferable for the coating thickness of 15 μm or
below ensuring uniform distribution of luminance.

▪ Curing of Vehicle Headlights


Application
▪ UV automation system (General Application)
▪ AOP System for Water Treatment

Rated Lamp Arc Length Total Length


Lamp Load (W/cm) Lamp Type Cross Reference
Power(W) (mm) (mm)
60 HUV-025L161 2500 400 520
70 HUV-028L182 2800 400 505 HHL-2800/B-FL/N
HQUV-020L201 2000 250 360 UVL-2000RS
80 HUV-040L202 4000 500 625 HHL400/C-FS
HUV-10L201 10000 1250 1400 PM3214
HUV-028L212 2800 350 476 HHL-2800/C-FS
90
HUV-043L231 4300 460 553 6818A460
100 HUV-030L251/P 300 305 430 UVH 3022-0
HUV-036L281 3600 300 398 HGUV H36/300C
110 HUV-055L281 5500 500 620 H6000/E0
HUV-069L271 6900 655 788 CS-137
HUV-036L301 3600 300 400 CS-419
HUV-084L301 8400 720 825 GP-8430A
120
HUV-150L301 15000 1250 1350 H15-31
HUV-168L301 16700 1400 1575 1400 MKX1
HUV-004L331/SE 400 30 112 HOK 04/120SE
130 HUV-016L331 1600 125 222 PM2886
HUV-062L321 6200 490 598 600H-2
150 HUV-038L381 3800 250 375 UVL 4000N
HUV-020L401/S 2000 125 225 H02-L41
160
HUV-080L401W 8000 500 630 H08-L41
180 HUV-047L441 4700 270 355 THS 5000H
200 HUV-070L501 6600 350 480 M350-U2H/GA
270 HUV-068L681 6800 250 350 UVL 7000N
280 HUV-070L701 7000 255 350 AC-2329

11
Industrial Lamp Series

High/Medium Pressure UV Metal(Fe) Lamp

High/Medium Pressure UV Metal(Ga) Lamp

12
High/Medium Pressure UV Metal(Fe) Lamp Series uses the metal’s unique spectrum
Description (320nm~450nm) near the center wavelength 365nm of the lamp light emission.
▪ LCD Edge Exposure
Application ▪ Curing for PDP, OLED, LCD Module Assembly
▪ UV Curing of flat screen printing - Printing and coating of papers, PVC, P.P, PE, etc.

Lamp Load (W/cm) Lamp Type Rated Lamp Arc Length Total Length Cross Reference
Power(W) (mm) (mm)
60 MFUV-072L152 7,200 1,200 1,314 YMX-7200TLE
80 MFUV-010L201 1,100 125 252
100 MFUV-065L251 6,500 680 800
MFUV-046L291 4,600 400 500 MAL 400(N)L
110
MFUV-077L281 7,700 700 800 M084-L31
MFUV-015L312 1,500 122 220 M015-L312
MFUV-016L301 1,600 136 218 VZERO 140D
120
MFUV-030L301/S 3,000 250 350 M03-L31
MFUV-090L301 9,000 750 850 CS-440
MFUV-096L402 9,600 600 700 UVL-9601KM3-0
MFUV-176L402 17,600 1,100 1,226 SYL-01U01-01
160
MFUV-180L402 17,600 1,100 1,326 UVL-18K1M3-0
MFUV-240L402 24,000 1,500 1,730 IVL-24K1M3-OT1
200 MFUV-100L501 10,000 505 600 FSG100/QK
MFUV-07L65 7,140 270 388 SMX-7000/Amba-7000/A+7000
260 MFUV-09L65 9,000 335 450 SMX-9000, YMX-9000
MFUV-100L641 10,200 400 508 STF-SMX-10KH
MFUV-070L701 7,000 250 350 UVL-7000M4-N
280
MFUV-100L701 10,000 360 480 FGQ10K, YMX-10000
320 MFUV-050L811 5,000 155 240 MHL-5027
490 MFUV-050L1221/O 5,000 102 189 L1261
630 MFUV-080L1481/O 8,000 135 245 L1281

High/Medium Pressure UV Metal(Ga) Lamp Series uses the metal’s unique spectrum, and the
Description center wavelength of lamp light emission is 420nm region (including 425nm, 405nm)

▪ Shadow Mask Exposure


Application ▪ Diazo film exposure development, Etching Industry, High-glossy Products
▪ Examination of PCB photomask (Screen panel Exposure)

Lamp Load (W/cm) Lamp Type Rated Lamp Arc Length Total Length Cross Reference
Power(W) (mm) (mm)
MGUV-008L252 800 80 167 MRS-800G
100
MGUV-010L252 1,000 100 187 GL-10201BF

180 MGUV-03L501 3,000 150 270 GL-30201BF

260 MGUV-05L65 5,000 200 308 SPG5000

490 MGUV-050L1221 5,000 102 189 L1250

520 MGUV-080L1291 8,000 460 250 L1280

13
Industrial Lamp Series

Xenon Flash Lamp

Xenon Flash Lamp provides a high-intensity continuous spectrum from the UV through the
Description visible to the infrared range and outstanding features.
▪ Automotive / General welding & cutting
Application ▪ Marking / Engraving
▪ Medical Application General Surgical, Dental etc.
Bore Arc length Overall Average OperatingVolts Recommended
Lamp Type Diameter length Max Power Trigger Pulse
mm mm mm Watts Amps V min V max KV
XF 560 3 60 150 900 280 600 2100 16
XF 672 4 72 174 1810 500 600 2100 16
XF 750 5 50 94 1570 800 500 1750 16
XF 790 6 90 190 4600 1100 700 2600 16

Super High Pressure Capillary Mercury Lamp

14
Excimer Lamp

A feature of excimer light emission is that it has only one emission peak. It emits light within an
Description extremely narrow wavelength rage.
▪ Optical Surface Cleansing for Wafer, LCD, C/F process
Application ▪ De-ionized Water Process, Producing Ozone
▪ Removing Minute Particles from Metallic Materials
Power Overall Length Diameter Discharge Gap Discharge Length
Wavelength
(W) (mm) (mm) (mm) (mm)
KrCl*(222nm) 20 158 43 8 100
XeI*(253nm) 20 158 43 8 100
XeCl*(308nm) 20 158 43 8 100

Super High Pressure Capillary Mercury Lamp is a lamp using mercury's unique spectrum. This
Description
product is used for PCB, color cathode ray tube(CRT) and other exposure process. In particular,
the width and shape of a fluorescent film and graphite film of a color CRT and the pattern of
PCB are determined by the arc length, exposure time, and the luminance intensity of a lamp.

▪ For PCB exposure, and other exposure process


Application
▪ Lead Frame & Semiconductor Exposure
▪ UV Polymerization

Application Lamp Type Power(W) Voltage(V) Current(A) Cross Reference


CRT SHC-425 900 720 1.25 CHM-4025
Exposure SHC-630 1,100 880 1.25 CHM-630
SHC-695 5,000 3,000 1.8 HT-5000
SHC-690 3,000 1,960 1.8 IML-3000
PCB SHC-6130 4,000 2,620 1.8 IML-4000
Exposure SHC-6140 5,000 3,180 1.8 IML-5000
SHC-682 3,000 1,960 1.8 CHM-3000
SHC-6140W 5,000 3,180 1.85 YHM-5000

15
Industrial Lamp Series

Low Pressure Mercury Lamp


(High Power Type)

Description Low Pressure Mercury Lamp can dissolve organic substances of 50-100Å thickness in the air
for 1 minute. This lamp can remove even the atoms of organic substances floating in the air or the
thin film of organic solvents in a short period of time.

▪ Optical cleansing of semiconductor, LCD and PDP


Application
▪ Surface improvement of a semiconductor, LCD and PDP
▪ Water treatment(for potable water or recycling of waste water)
▪ Air treatment (for air conditioning system)

Specification

Lamp Rated lamp Operating Operating


power voltage current
Total
length
Arc
length Diameter Guaranteed
lifetime Remark
Type [W] [V] [A] [mm] [mm] [mm] [hrs]
LUV/S 200N 200 130 1.7 490 450 17 3000 N Type
LUV/S 155L 155 155 1.0 1587 1475 17 4000 L Type
LUV/S 110U1 110 130 0.9 640 565 17 3000 U Type
LUV/S 110L 110 130 0.9 1250 1100 17 3000 L Type
LUV/S 90U1 90 130 0.75 530 455 17 3000 U Type
LUV/S 90L 90 130 0.75 1040 890 17 3000 L Type
LUV/S 40 40 120 0.35 530 390 17 3000 L Type

※ Products of other specifications than those described above can be provided. Lighting Direction : Horizontal Lighting
(The models above are representative ones.) Cooling System : Indirect Water-Cooling, Air-Cooling

Dimension
L Type U Type N Type

16
Low Pressure Mercury UV Fluorescent Lamp

Description Pressure Mercury UV Fluorescent Lamp is mainly used for UV photochemical reaction.
UVA, UVB, UVAB types are available. Relative UV efficiency is very high and the lamp’s low temperature is
necessary for heat-sensitive substrates.

▪ Manufacturing LED optical film (Nano Imprinting)


Application
▪ LED photochemical reaction
▪ LCD photochemical reaction

Specification
Rated lamp Operating Operating Total Guaranteed
Lamp Diameter
power voltage current length lifetime Remark
Type [mm]
[W] [V] [A] [mm] [hrs]
LUV/F 100W/R-UVAB-17 100 122 0.97 1763 40 1000 G13

LUV/F 80W/10R-UVA-15 80 114 0.83 1500 40 1000 G13

LUV/F 100W/10R-UVA-17 100 122 0.97 1763 40 1000 G13

LUV/F 140W/10R-UVA-15 140 122 1.48 1500 40 1000 G13

LUV/F 140W/10R-UVA-17 140 118 1.46 1763 40 1000 G13

LUV/F 110W/UVB-23 110 2380 38 R17d

LUV/F 120W/UVB-25 120 2650 38 R17d

※ Products of other specifications than those described above can be provided. Lighting Direction : Horizontal Lighting
(The models above are representative ones.) Cooling System : Indirect Water-Cooling, Air-Cooling

Spectral Distribution
950
900
850
800
750
700
650
600
550
500
450
400
350
300
250
200
150
100
50
0
-50

100 150 200 250 300 350 400 450 500 550 600 650 700

17
Optical Systems

UV Curing & Drying System


Medium, Large Size
PDP Panel UV Curing System (Dampproofing)

UV Conveyor System

UV Conveyor System for Curing and Drying Small size UV Conveyor System

Features Features
• Uniform Curing & Superior Heat control System • Consecutive lighting. Power Control Method : 2-3 Step Power
• Shutter Open/ Close Operation Control, Continuous Change Available
• Roll to Roll type, Special Roller Installed
Application
Application
• PDP Lead Frame protection
• UV Curing below 250mm in width, Resin Printing
• Curing for EGI, Coating
Optical Film UV Curing System
OLED 4th Generation Module
Assembly Curing System

Features Features
• Uniform Curing & Superior Heat Control System • Uniform Curing & Superior Heat Control System
• Elliptical Focus Type with Elliptical Reflector and lens
Application
• High UV Intensity and Superior Uniformity
• Curing for the process of OLED 4th Generation(920×730)
Encapsulation Application
• Shutter Open/Close Operation • Optical film exposure, bonding, and deformation using main
• Easy Lamp Output Control by Power Controller wavelength of UV 365nm

18
All about Industrial Lamps
& Optical Systems

Full Auto Spot Curing System


Small Size Spot Curing

[750~1000W]

Features Features
• Easy application, Instant curing, Remote Control • Easy application, Instant curing, Remote Control
Application Application
• Spot cure such as bonding(fixation) of LED or Lens • Fixation of Lens or Light pick-up module
Portable Curing System for Lab

Optical Film UV Curing System

Features Features
• Small sized(light and portable). Appropriate for laboratory Test • UV light source with large output using Short Arc or Long arc
• Open/Close Door Type, Curing Condition Setup lamp, Attainment of 90% Uniformity
• Aluminum Reflector + Cold Mirror + Filter
Application
• Test Curing for small sized products with curing area under Application
200x200 mm • Optical film exposure, bonding and deformations using main
Wavelength of UV 365nm

19
Optical Systems

UV Curing & Drying System


UV Curing & Cleansing Conveyor System

Lamp House for UV Curing


Lamp House

Features Features Features


• Uniform Curing and Cleaning Effect • Air Cooling Type • 13.9[Kw] Lamp is used
• Adjustable Conveyor Width, Control • Adjustable UV Irradiation distance • Lamp Lifetime 3,000hrs
Capacity, and Lamp Quantity by Stage Height Setup • Uniformity 85% (±7.5%)
Application Application Application
• Semiconductor, OLED, LCD, PDP etc. • Exposure for Lab use • Graphics/Optical Films/PDP Surface UV
procedure etc.
UV-LED Spot Curing System
Portable Curing System

De-Bonding System

Features Features Features


• Portable, Light weight • High Pressure Metal 1,800± 100 [W] UV • Lifetime more than 20,000 hrs
• 2Kw, 1Kw, and 400W available Lamp used. (Lamp Lifetime 750 hrs) • No additional cooling system required
• Timer for Cooling Fan Operation • Expandable UV channel (up to 10ch)
Application • Upper UV Irradiation Type
• Small area cure, Easy surface repair Application
Application • Spot or Portable UV Curing
• Mainly used for Semiconductor chipset
de-bonding

20
All about Industrial Lamps
& Optical Systems

UV Exposure System
Mask Aligner System (Small Size Paralleled UV Exposure)

Paralleled UV Exposure System

Features Features
• High Intensity of Collimation, Electronic Power Supply • Touch Screen Panel, Electronic Power Supply
• Short Arc Lamp • Short Arc Lamp
(2kW under, 365nm : 15~23mW/cm2, 405nm : 30~40mW/cm2) (4.3Kw above, 365nm : 15~20mW/cm2, 405nm : 30~40mW/cm2)
Application Application
• Test Curing for small sized products with curing area under 200x200mm • PCB, Polyamide film, Other Exposure
Lamp House for UV Exposure, Curing, & Drying

UV Exposure System

Features Features
• Easy to use, Instant curing • Diffuse UV Exposure, Stable Uniformity for Wide Area
• Forced-air cooling • Optimized Exposure by vertical type
Application Application
• PCB Exposure, Film Curing • Wide Display Panel Exposure

21
Optical Systems

UV Exposure System
Scattered Light Exposure System for

Edge Exposure System


Polyamide Film

Features Features
• High Voltage UV(Mercury or Metal) Lamp • Short Arc Lamp[500~1000W]
• Uniformity less than ±10%, Resolution 30㎛(Max 20㎛) • Uniformity less than ±5%, Resolution 30㎛(Max 20㎛)
• UV beam size 200x200mm (Other size available) • UV beam size 50x50mm, 10x5.5mm (Other size available)
• Electronic Power Supply, Limited luminance & power control • Electronic Power Supply, Constant energy or intensity control
Application Application
• Exposure (Diffusion) experiment and mass production over • Edge Exposure of LCD, Photo mask, and Wafer
30㎛ beam
Light Source for Image Exposure
Super Large sized Screen Scan Type

System (Source for DMD)


UV Exposure System

Features Features
• UV Xenon Mercury Lamp • Short Arc Lamp[750~1000W]
• Uniformity less than ±5%, Resolution 30㎛(Max 20㎛) • Uniformity less than ±4%
• UV beam size 220x1100mm • UV beam size 14.5x10.4mm
• Large dimension, High Uniformity in scattered light exposure
Application Application
• Photo mask examination exposure (Screen Panel exposure) • Illuminator for digital exposure, Projection light source
• Photo mask examination exposure (Screen Panel exposure)

22
All about Industrial Lamps
& Optical Systems

UV System for Inspection


Inspection System makes it possible to do many kinds of inspection with special wavelength of UV and visible ray. The light
sources used for Macro and Micro inspection system which is used for LCD manufacture and industrial inspection equipment
are the most widely used types. In the present industry, most of all products need to go through inspection process which
can not be done by general light sources. Therefore, Inspection system with high classification ability and minute light
sources are very much required. Inspection system is mainly used to find out spot, residue, location, sizes, and faults.
LCD, Micro/Macro Inspection System

UV Irradiation System for Crystal


Liquid Inspection

Features Features
• DC Metal Short Arc Lamp(150, 200, 250W) • Instant lighting UV Mercury lamp 2Kw
• Wavelength 420~780nm, Color Temperature 7500K • Wavelength Max. 250nm
• Long lifetime, High brightness, High luminous flux • Uniformity less than ±5%

Application Application
• Light source for macro or micro inspection equipment • Test and inspection for liquid crystal response
UV Inspection for Glass Distortion

Power Supply for LUV or Low


Pressure Fluorescent lamp
Lamp & Ballast Assembly

Features Features Features


• Inspection for glass surface state • Provides the full spectrum light source • High efficiency, high power factor, dimmable
• Glass distortion by adjusting launch including visible light
angle of light
Application
Application • UV exposure for LCD, optical films, etc.
Application • Inspection system for LCD and other
• Inspection for glass distortion and glass display panels
surface state

23
Optical Systems

UV Module System
Polarized UV Exposure System

Features Features
• Multiple Polarized Filters for Maximum Polarization • Shutter On/Off Operation
• Window for Exposure Status Check Application
Application • Optical Film, Prism Sheet, Graphics, Offset, Gravure, OPV,
• Used for Micro-Pattern Exposure and Curing Screen etc.
Optical Cleansing & UV Surface Improvement System
UV Seal System

Features Features
• Fast Curing Speed, 10.5 [Kw] Lamp used • 90[W] Lamp used, Lamp Lifetime 3,000 hrs
• Lamp lifetime 3,000 hrs, Uniformity 85% (± 7.5%) • Uniformity 70% (±15%), UV Irradiation Area 470x370mm
Application • Adjustable Stage Height within 80mm
• Used for PCB conformal Coating and PCB Sealing Application
• LCD, PDP, OLED etc.

24
All about Industrial Lamps
& Optical Systems

Super Pure Water Treatment & Surface Improvement System


It is necessary to remove minute particles from metal, metallic oxide, glass, etc. when manufacturing Semi Conductor, LCD,
and PDP in IT industry. Minute particles can increase the rate of product failure by affecting bonding and adhesion. Unilam's
cleaning equipment can remove organic substances with the thickness of 50~100Å within a minute in the air. In terms of
floating organic substances and organic solvent, it is possible to remove them up to atomic level.

Characteristics of high output & low voltage amalgam UV lamp


Water Purification System with UV Photopolymerization
Decomposition of corpuscular(185nm) organism and Production of OH- by
breaking down water molecules using higher energy compared to 254nm.
Features • Super Water Purification Complex using UV & low
voltage amalgam UV lamp
Application • Water purification or recycling using mainly
185nm
EDI+AC+MF+UV

1st Treatment 2nd Treatment


Water
(Purification (Super purification Supper pure water
Supplied
equipment) equipment)

Surface Improvement or Optical Cleansing System for Glass, Plastic, and Metal Deep UV Photopolymerization System for Lab.

Application Features
• Optical cleansing and improving characteristics of materials • Photopolymerization system using high output & low voltage
by irradiating 185nm wavelength on the surface of LCD panel amalgam mercury lamp
(glass), metal, plastic (PE, PET, etc.) Application
• Photopolymerization using mainly UV 185nm, 254nm

Deep UV Photopolymerization System

Features
• Photopolymerization using mainly UV 185nm, 254nm
Application
• Induction of photopolymerization using mainly
UV 185nm, 254nm

25
Optical Systems

Power Supply
Power supply is a necessity to ignite and stabilize lamps due to Discharge lamp's own characteristic.
Unilam power supply produces maximized function of light sources as it is designed best for Unilam light sources.

Electronic Power Supply


Power Supply Type AC(square wave) Type ~ 10Kw / DC Type ~ 8Kw
Applicable Lamp UV Long Arc lamp(UV Metal, Mercury lamp)
DC Short Arc Lamp(Super high pressure Mercury lamp, Xenon lamp)
Control Method Fully limited power control, Semi-limited power control,
Limited luminance control
Motion Method Pulse type High Voltage or DC type High Voltage
Features Under 2% ripple rate of lamp voltage. Minimize outside noise
Easy operation, Excellent control of power and luminance
Application Control lighting and maintenance of industrial lamp

Magnetic Power Supply (C Type)


Power Supply Type C Type~ 30Kw
Applicable Lamp UV Long Arc lamp (UV Metal, Mercury lamp)
Control Method Full power control or Full /Half power control with the 2nd
Condensor
Motion Method Pulse type Ignitor (UV Metal Lamp)
Features Preferable on maintaining power within 5% input voltage
fluctuation
Competitively low price
Application Control lighting and maintenance of UV Metal/Mercury lamp

Magnetic Power Supply (T Type)


Power Supply Type T Type
Applicable Lamp UV Long Arc lamp (UV Metal, Mercury lamp)
Control Method Full power control or Full /Half power control using Choke trans
Motion Method Pulse type Ignitor (UV Metal Lamp)
Features Preferable on maintaining power within 10% input voltage
fluctuation
Competitive with external variables
Application Control lighting and maintenance of UV Metal/Mercury lamp

Magnetic Power Supply (Continuously Changeable T Type)


Power Supply Type Continuously Changeable T Type
Applicable Lamp UV Long Arc Lamp (UV Metal, Mercury lamp)
Control Method Continuously changeable within 30~100% of the output
Motion Method Pulse type Igniter (UV Metal Lamp)
Power control trans
Features Preferable on input changes, especially controlling UV output
(Continuous change control of UV output available)
Application Control lighting and maintenance of UV Metal/Mercury lamp
Main Trans Power controller

26
All about Industrial Lamps
& Optical Systems

Other Optical Components


To use lamp with the maximized lamp efficiency, there should be right Reflector, Mirror, and Filter.
Cold Reflector for
Collimated light

Collimated light
Cold Mirror
Function Function
• Protects lamp from heat by reflecting IR and penetrating UV • UV collection and reflection (IR penetration)
• Concentrates UV to calculated focal distance Application
Application • Quartz or synthetic Quartz
• Pyrex
Hot Mirror for Scattered
Light (Cold Filter)
Reflector for
Visible Light

Function Function
• Protects lamp from heat by reflecting a • Protects lamp from heat by reflecting
Light Guide

visible ray, IR, and penetrating UV IR and enables efficient operation by


• Concentrates visible ray to the penetrating UV
calculated focal distance
Application
Application • Quartz or Synthetic Quartz
• Pyrex
Water Cooling Jacket
Cold Reflector for
Collimated light

Special Filters
Color Filter &

Function Function Function


• UV collection and reflection • Selective reflection and penetration of • Indirect water cooling jacket
• Concentrates UV to the calculated specific wavelength area (UV penetration, heat cutoff)
focal distance Application
Application • Quartz or Synthetic Quartz
• SUS

27
Industrial Light Sources &
Applications Technology

Head Office(Factory)
23, Samdong-ro, Samnam-myeon, Ulju-gun, Ulsan, Korea (689-813)
Tel: 82-55-372-2502~12 Fax: 82-55-372-2513

Overseas Sales Department


Room1213, 161, Simin-daero, Dongan-gu, Anyang-si, Gyeonggi-do, Korea (431-817)
Tel: 82-31-440-8830, 8831, 8837 Fax : 82-31-440-8832

Domestic Sales Department


Room 208, 95, 2gongdan 2-ro, Seobuk-gu, Cheonan-si, Chungcheongnam-do, Korea (331-200)
Tel: 82-41-622-8820, 8821 Fax: 82-41-622-8819

www.unilam.co.kr E-mail : sales@unilam.co.kr

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